Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 41(6); 2008
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2008;41(6):331-334. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2008.41.6.331

Fabrication of High Ordered Nano-sphere Array on Curved Substrate by Nanoimprint Lithography

  • Hong, S.H.;Bae, B.J.;Kwak, S.U.;Lee, H.;
    Department of Materials Science and Engineering, Korea University;Department of Materials Science and Engineering, Korea University;RND center, Kornic System Co.;Department of Materials Science and Engineering, Korea University;
Abstract

The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. First, silica nano-sphere array on Si substrate was transferred to PVC film at $130^{circ}C$ and 7 bar using hot embossing process. Then, silic

Keywords Nano-sphere;Flexible template;UV nanoimprint lithography;Curved substrate;