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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 42(1); 2009
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2009;42(1):1-7. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2009.42.1.001
Evaporation Characteristics of Aluminum by Using Surface-treated Graphite Boat
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Facility & Automation Research Division, Research Institute of Industrial Science & Technology;Facility & Automation Research Division, Research Institute of Industrial Science & Technology;
Abstract
Resistive heating sources are widely used to prepare thin films by vapor deposition because they are cheap, and easy to install and handle in vacuum system. Graphite is one of materials used to make the resistive heating source, but until now only limited
Keywords Resistive heating source;Evaporation boat;Graphite boat;Aluminum film;Evaporation characteristics;Physical vapor deposition;