Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 42(3); 2009
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2009;42(3):122-127. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2009.42.3.122

Electrical and Structural Properties of GAZO Films Deposited by DC Magnetron Co-sputtering System with Two Cathodes

  • Jie, Luo;Park, Se-Hun;Song, Pung-Keun;
    Department of Materials Science and Engineering, Pusan National University;Department of Materials Science and Engineering, Pusan National University;Department of Materials Science and Engineering, Pusan National University;
Abstract

Ga/Al doped ZnO (GAZO) thin films were prepared on non-alkali glass substrate by co-sputtering system using two DC cathodes equipped with AZO ($Al_2O_3$:2.0 wt%) target and GZO ($Ga_2O_3$:6.65 wt%) target. This study examined the inf

Keywords Al doped ZnO;Ga doped ZnO;Ga/Al co-doped ZnO;Co-sputtering;