Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 42(3); 2009
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2009;42(3):128-132. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2009.42.3.128

Investigation of Transparent Conductive Oxide Films Deposited by Co-sputtering of ITO and AZO

  • Kim, Dong-Ho;Kim, Hye-Ri;Lee, Sung-Hun;Byon, Eung-Sun;Lee, Gun-Hwan;
    Functional Coatings Research Group, Korea Institute of Materials Science(KIMS);Functional Coatings Research Group, Korea Institute of Materials Science(KIMS);Functional Coatings Research Group, Korea Institute of Materials Science(KIMS);Functional Coating
Abstract

Transparent conducting thin films of indium tin oxide(ITO) co-sputtered with aluminum-doped zinc oxide(AZO) were deposited on glass substrate by dual magnetron sputtering. It was found that the electrical properties and structural characteristics of the f

Keywords Transparent conductive oxide;Indium tin oxide;Aluminum zinc oxide;Sputtering;Electrical transport properties;Transmittance;