Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 42(3); 2009
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2009;42(3):133-138. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2009.42.3.133

Observation of Plasma Shape by Continuous dc and Pulsed dc

  • Yang, Won-Kyun;Joo, Jung-Hoon;
    Department of Materials Science and Engineering, Plasma Materials Research Center Kunsan National University;Department of Materials Science and Engineering, Plasma Materials Research Center Kunsan National University;
Abstract

Effects of bipolar pulse driving frequency between 50 kHz and 250 kHz on the discharge shapes were analyzed by measuring plasma characteristics by OES (Optical Emission Spectroscopy) and Langmuir probe. Plasma characteristics were modeled by a simple elec

Keywords Bipolar pulsed dc;Plasma shape;CCP;Plasma modeling;