Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 42(4); 2009
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2009;42(4):173-178. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2009.42.4.173

The Application of DLC(diamond-like carbon) Film for Plastic Injection Mold by Hybrid Method of RF Sputtering and Ion Source

  • Kim, Mi-Seon;Hong, Sung-Pill;
    K. DLC CO., LTD.;K. DLC CO., LTD.;
Abstract

DLC film was synthesized on plastic injection mold(SKD11, $30;mm;{ imes};19;mm;{ imes};0.5;mm$) and Si(100) wafer for 2 h at $130^{circ}C$ under 6 mTorr using hybrid method of rf sputtering and ion source. The obtained film was analy

Keywords DLC;RF sputtering;Raman spectroscopy;Friction coefficient;Adhesion;