Oct, 31, 2024

Vol.57 No.5

Current Issue Archives
Search
Advanced Search
Editorial Office

Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 42(4); 2009
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2009;42(4):179-185. Published online: Nov, 30, -0001

PDF

DOI : 10.5695/JKISE.2009.42.4.179

Effect of Anode Voltage on Diamond-like Carbon Thin Film Using Linear Ion Source

  • Kim, Wang-Ryeol;Jung, Uoo-Chang;Jo, Hyung-Ho;Park, Min-Suk;Chung, Won-Sub;
    Department of Materials Science and Engineering, Pusan National University;Dongnam Technology Service Division, Korea Institute of Industrial Technology;Dongnam Technology Service Division, Korea Institute of Industrial Technology;J&L Tech Co., Ltd.;Depar
Abstract

Diamond-like carbon(DLC) films were deposited by linear ion source(LIS)-physical vapor deposition method changing the anode voltages from 800 V to 1800 V, and characteristics of the films were investigated using residual stress tester, nano-indentation, m

Keywords DLC;Linear ion source;PVD;Anode voltage;Hardness;