Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 42(5); 2009
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2009;42(5):216-219. Published online: Nov, 30, -0001

PDF

DOI : 10.5695/JKISE.2009.42.5.216

SAW Filter Made of ZnO/Nanocrystalline Diamond Thin Films

  • Jung, Doo-Young;Kang, Chan-Hyoung;
    Department of Advanced Materials Engineering, Korea Polytechnic University;Department of Advanced Materials Engineering, Korea Polytechnic University;
Abstract

A surface acoustic wave (SAW) filter structure was fabricated employing $4{mu}m$ thick nanocrystalline diamond (NCD) and $2.2{mu}m$ thick ZnO films on Si wafer. The NCD film was deposited in an $Ar/CH_4$ gas mixture by mic

Keywords SAW filter;ZnO;Nanocrystalline diamond;Microwave plasma CVD;