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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 42(6); 2009
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2009;42(6):267-271. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2009.42.6.267
Effect of H2 Addition on the Properties of Transparent Conducting Oxide Films Deposited by Co-sputtering of ITO and AZO
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Functional Coatings Research Group, Korea Institute of Materials Science(KIMS);Functional Coatings Research Group, Korea Institute of Materials Science(KIMS);Functional Coatings Research Group, Korea Institute of Materials Science(KIMS);Functional Coating
Abstract
Multicomponent transparent conducting oxide films were deposited on glass substrates at 150 by dual magnetron sputtering of AZO and ITO targets. In the case of mixing a limited amount of ITO (10W), resistivity of TCO films was significantly increased comp
Keywords Transparent conducting oxide;Indium tin oxide;Aluminum zinc oxide;Hydrogen;Electrical transport properties;