Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 46(2); 2013
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2013;46(2):55-60. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2013.46.2.055

A Comparative Study of Superhard TiN Coatings Deposited by DC and Inductively Coupled Plasma Magnetron Sputtering

  • Chun, Sung-Yong;
    Department of Advanced Materials Science and Engineering, Mokpo National University;
Abstract

Superhard TiN coatings were fabricated by DC and ICP (inductively coupled plasma) assisted magnetron sputtering techniques. The effect of ICP power, ranging from 0 to 300 W, on coating microstructure, preferred orientation mechanical properties were syste

Keywords Superhard;Inductively coupled plasma;ICP power;Crystal grain size;Residual stress;