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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 46(3); 2013
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2013;46(3):99-104. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2013.46.3.099
Microfabrication of Photosensitive Glass Using Metal Patterning and Blank Exposure
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Department of Advanced Materials Engineering, Korea Polytechnic University;Protom Co., Ltd.;Protom Co., Ltd.;Protom Co., Ltd.;Protom Co., Ltd.;Department of Bionano Technology, Hanyang University;Department of Advanced Materials Engineering, Korea Polytec
Abstract
The simple and cost-effective microfabrication method of photosensitive glass (PSG) using metal patterning and blank exposure was proposed. Conventional photolithography for micromachining of PSG needs a costly quartz mask which has high transmittance as
Keywords Photosensitive glass (PSG);Blank exposure;Microfabrication;Glass etching;