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KISE Journal of Korean Institute of Surface Engineering 2014;47(1):53-56. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2014.47.1.053
I-V characteristics of a cylindrical target in an ECR plasma were studied for sheath spatial evolutions when the target was pulsed biased to a high negative potential. The magnetic field effects on sheath thickness and sheath boundary speed were investiga
Keywords ECR plasma;High voltage pulse;