Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 47(2); 2014
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2014;47(2):75-80. Published online: Nov, 30, -0001

PDF

DOI : 10.5695/JKISE.2014.47.2.075

Nanocrystalline Diamond Coating on Steel with SiC Interlayer

  • Myung, Jae-Woo;Kang, Chan Hyoung;
    Department of Advanced Materials Engineering, Korea Polytechnic University;Department of Advanced Materials Engineering, Korea Polytechnic University;
Abstract

Nanocrystalline diamond(NCD) films on steel(SKH51) has been investigated using SiC interlayer film. SiC was deposited on SKH51 or Si wafer by RF magnetron sputter. NCD was deposited on SiC at $600^{circ}C$ for 0.5~4 h employing microwave plasma

Keywords Nanocrystalline diamond;Microwave plasma CVD;Silicon carbide;Adhesion;