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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 47(4); 2014
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2014;47(4):168-173. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2014.47.4.168
A Comparative Study of TiAlN Coatings Deposited by DC and Pulsed DC Asymmetric Bipolar Magnetron Sputtering
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Department of Advanced Materials Science and Engineering, Mokpo National University;Department of Advanced Materials Science and Engineering, Mokpo National University;
Abstract
The paper presents the comparative results of TiAlN coatings deposited by DC and pulsed DC asymmetric bipolar magnetron sputtering systems. The results show that, with the decreasing duty cycle and increasing pulse frequency, the coating morphology change
Keywords Pulsed DC Sputtering;TiAlN;Asymmetric Bipolar;Duty cycle;Pulse frequency;