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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 47(4); 2014
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2014;47(4):174-180. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2014.47.4.174
Mechanical Properties of TiAlSiN films Coated by Hybrid Process
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System Solution Research Center, Research Institute of Industrial Science & Technology;System Solution Research Center, Research Institute of Industrial Science & Technology;System Solution Research Center, Research Institute of Industrial Science & Techn
Abstract
In this study, TiAlSiN coatings have been successfully synthesized on stainless steel and tungsten carbide substrate by a hybrid coating method employing a cathodic arc and a magnetron sputtering source. TiAl and Si target were vaporized with the cathodic
Keywords Magnetron Sputtering;Cathodic Arc Deposition;TiAlSiN Coating;Hybrid Process;Oxidation Resistance;