Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 47(5); 2014
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2014;47(5):239-243. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2014.47.5.239

Electrical and Optical Properties of Amorphous ITZO Deposited at Room Temperature by RF Magnetron Sputtering

  • Lee, Ki Chang;Jo, Kwang-Min;Lee, Joon-Hyung;Kim, Jeong-Joo;Heo, Young-Woo;
    School of Materials Science and Engineering, Kyungpook National University;School of Materials Science and Engineering, Kyungpook National University;School of Materials Science and Engineering, Kyungpook National University;School of Materials Science an
Abstract

The electrical and optical properties of amorphous In-Tin-Zinc-Oxide(ITZO) deposited at room temperature using rf-magnetron sputtering were investigated. The amorphous ITZO thin films were obtained at the composition of In:Sn:Zn = 6:2:2, 4:3:3, and 2:4:4,

Keywords ITZO;RF Magnetron sputtering;Oxide TFT;transparent conductive oxide;