Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 47(6); 2014
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2014;47(6):341-346. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2014.47.6.341

Effect of Electron Irradiation Energy on the Properties of GZO/SiO2 Thin Films on Polycarbonate

  • Heo, Sung-Bo;Park, Min-Jae;Jung, Uoo-Chang;Kim, Dae-Il;Cha, Byung-Chul;
    Korea Institute of Industrial Technology (KITECH);Korea Institute of Industrial Technology (KITECH);Korea Institute of Industrial Technology (KITECH);School of materials science and Engineering, University of Ulsan;Korea Institute of Industrial Technology
Abstract

Ga-doped ZnO (GZO) single layer and $SiO_2/GZO$ bi-layered films were deposited on Polycarbonate(PC) substrate by radio frequency magnetron sputtering. Influence of the structural, electrical, and optical properties of the films was considered.

Keywords GZO;E-beam Irradiation;$SiO_2$;Buffer layer;Optical transmittance;