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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 47(6); 2014
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2014;47(6):354-361. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2014.47.6.354
Endurance and Compatibility of Silicon Carbide as Fluidized Bed Reactor for Poly-silicon
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Icheon Branch, Korea Institute of Ceramic Eng. & Tech.;Icheon Branch, Korea Institute of Ceramic Eng. & Tech.;Icheon Branch, Korea Institute of Ceramic Eng. & Tech.;Siliconvalue Co., Ltd.;
Abstract
In order to utilize silicon carbide (SiC) as an inner part of fluidized bed reactor (FBR) for manufacturing poly-silicon, we have carried out the thermodynamic calculation on the overall reactions including poly-silicon synthesis and compatibility of SiC
Keywords CVD;silicon carbide;fluidized bed reactor;thermodynamics;silicon granule;