Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 47(6); 2014
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2014;47(6):362-367. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2014.47.6.362

Design and Fabrication of Dual Tip Si3N4 Probe for Dip-pen Nanolithograpy

  • Kim, Kyung Ho;Han, Yoonsoo;
    Engineering Ceramic Team, KICET Ichron Branch;Engineering Ceramic Team, KICET Ichron Branch;
Abstract

We report the design, fabrication of a $Si_3N_4$ probe and calculation of its mechanical properties for DPN(dip pen nanolithography), which consists of dual tips. Concept of dual tip probe is to employ individual tips on probe as either an AFM

Keywords Dual tip probe;Mechanical properties;Nanopatterning;