Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 48(2); 2015
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2015;48(2):50-55. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2015.48.2.50

Effect of Atomic Layer Deposited Al2O3 Thin Films on the Mechanical Properties of Anti-reflective Moth Eye Nanostructured Films

  • Yun, Eun Young;Lee, Woo-Jae;Jang, Kyung Su;Choi, Hyun-Jin;Choi, Woo-Chang;Kwon, Se Hun;
    School of Materials Science and Engineering, Pusan National University;School of Materials Science and Engineering, Pusan National University;Nano Convergence Team, Seo Yeong Co. Ltd.;MEMS/NANO Component Production Center;MEMS/NANO Component Production Ce
Abstract

$Al_2O_3$ thin films were deposited on the moth eye anti-reflective nanostructured polycarbonate films by atomic layer deposition (ALD) techniques. Without ALD-$Al_2O_3$ thin films, moth eye anti-reflective nanostructured films had a

Keywords Moth eye structure;Atomic layer deposition;$Al_2O_3$ thin films;Mechanical properties;