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KISE Journal of Korean Institute of Surface Engineering 2015;48(3):87-92. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2015.48.3.87
Carbon thin films were deposited on STS 316L sheets by inductively coupled plasma enhanced magnetron sputtering with or without substrate bias voltage. Typical Raman spectrum for amorphous diamond-like carbon (DLC) was obtained, and the interfacial contac
Keywords Carbon film;Sputtering;Bipolar plate;PEMFC;EIS;Corrosion;Porosity;ICR;