- Past Issues
- e-Submission
-
2021 Impact Factor 1.766
5-Year Impact Factor 1.674
Editorial Office
- +82-2-563-0935
- +82-2-558-2230
- submission@kssse.or.kr
- https://www.kssse.or.kr/
Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 48(4); 2015
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2015;48(4):136-141. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2015.48.4.136
A Comparative Study of NbN Coatings Deposited by DC and Pulsed DC Asymmetric Bipolar Magnetron Sputtering
-
Department of Advanced Materials Science and Engineering, Mokpo National University;Department of Advanced Materials Science and Engineering, Mokpo National University;
Abstract
The paper presents the comparative results of NbN coatings deposited by DC and pulsed DC asymmetric bipolar magnetron sputtering systems. The results show that, with the decreasing duty cycle and increasing pulse frequency, the coating morphology changes
Keywords Pulsed DC Sputtering;NbN;Asymmetric Bipolar;Duty cycle;Pulse frequency;