Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 48(4); 2015
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2015;48(4):179-184. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2015.48.4.179

Analysis of contaminated QMS, cleaning and restoration of functions

  • Kim, Donghoon;Joo, Junghoon;
    Department of Plasma Convergence Engineering, Kunsan National University;Department of Plasma Convergence Engineering, Kunsan National University;
Abstract

Quadrupole Mass Spectrometers (QMS) is a very useful tool in vacuum process diagnosis. Tungsten filament based ion sources are vulnerable to contamination from process gas monitoring. Common symptoms of quadrupole mass spectrometer malfunction is appearan

Keywords QMS;ion source;filament;cleaning;CFD-ACE+;