Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 48(5); 2015
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2015;48(5):205-210. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2015.48.5.205

Effect of Inductively Coupled Plasma on the Microstructure, Structure and Mechanical Properties of NbN Coatings

  • Chun, Sung-Yong;
    Department of Advanced Materials Science and Engineering Mokpo National University;
Abstract

NbN coatings were prepared by ICP (inductively coupled plasma) assisted magnetron sputtering from a Nb metal target in $Ar+N_2$ atmosphere at various ICP powers. Effect of ICP on the microstructure, crystalline structure and mechanical properti

Keywords Inductively Coupled Plasma;NbN coatings;Roughness;Structure;Morphology;