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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 48(6); 2015
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2015;48(6):253-259. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2015.48.6.253
A Study on Characteristics of the Ni-Pd Alloy Electroplating
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Department of Advanced Materials Engineering, Korea Polytechnic University;Department of Advanced Materials Engineering, Korea Polytechnic University;Department of Advanced Materials Engineering, Korea Polytechnic University;
Abstract
The test equipment becomes more important with the development of semiconductor industry. MEMS probe is an important testing component to detect the defects from the generated electric signal when it contacts the metal pad of semiconductor devices. Ni-Pd
Keywords Nickel-Palladium Alloy;Electroplating;Hardness;X-ray diffraction;Lattice parameter;Heat treatment;Sheet resistance;