Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 48(6); 2015
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2015;48(6):292-296. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2015.48.6.292

Structural and Optical Properties of ITZO Deposited by RF Magnetron Sputtering

  • Kim, Dong Ryeol;Bae, Ji Hwan;Hwang, Dong Hyun;Son, Young Guk;
    Department of Materials Science and Engineering, Pusan National University;Department of Materials Science and Engineering, Pusan National University;Department of Materials Science and Engineering, Silla University;Department of Materials Science and Eng
Abstract

Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from $100^{circ}C$ to $400^{circ}C$. The structural and optical properties of thin fil

Keywords ITZO;transmittance;RF Magnetron sputtering;thin film;