Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 49(3); 2016
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2016;49(3):307-315. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2016.49.3.307

Properties of AlTiN Films Deposited by Cathodic Arc Deposition

  • Yang, Ji-Hoon;Kim, Sung-Hwan;Song, Min-A;Jung, Jae-Hun;Jeong, Jae-In;
    Materials Solution Research Group, Research Institute of Industrial Science & Technology;Materials Solution Research Group, Research Institute of Industrial Science & Technology;Materials Solution Research Group, Research Institute of Industrial Science &
Abstract

The properties of AlTiN films by a cathodic arc deposition process have been studied. Oblique angle deposition has been applied to deposit AlTiN films. AlTiN films have been deposited on stainless steel (SUS304) and cemented carbide (WC) at a substrate te

Keywords AlTiN films;Cathodic arc deposition;Oblique angle deposition;Physical vapor deposition;Macroparticle;