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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 49(4); 2016
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2016;49(4):368-375. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2016.49.4.368
MoN-Cu Thin Films Deposited by Magnetron Sputtering with Single Alloying Target
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Department of Electrical Engineering, Inha University;Korea Institute of Industrial Technology, Heat Treatment R&BD Group;Department of Electrical Engineering, Inha University;
Abstract
MoN-Cu thin films were prepared to achieve appropriate properties of high hardness and low friction coefficient, which could be applied to automobile engine parts for reducing energy consumption as well as solving wear problems. Composite thin films of Mo
Keywords MoN-Cu thin films;Single alloying target;Magnetron sputtering;MA;SPS;