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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 49(4); 2016
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2016;49(4):376-381. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2016.49.4.376
Effect of Inductively Coupled Plasma on the Microstructure, Structure and Mechanical Properties of VN Coatings
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Department of Advanced Materials Science and Engineering Mokpo National University;Department of Advanced Materials Science and Engineering Mokpo National University;
Abstract
The effects of ICP (Inductively Coupled Plasma) power, ranging from 0 to 200 W, on the crystal structure, microstructure, surface roughness and mechanical properties of magnetron sputtered VN coatings were systematically investigated with FE-SEM, AFM, XRD
Keywords Inductively Coupled Plasma;VN coatings;Nanocrystalline;Grain size;Crystal structure;