Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 49(5); 2016
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2016;49(5):461-466. Published online: Nov, 30, -0001

PDF

DOI : 10.5695/JKISE.2016.49.5.461

Microstructure, Crystal Structure and Mechanical Properties of VN Coatings Using Asymmetric Bipolar Pulsed dc Sputtering

  • Chun, Sung-Yong;Jeong, Pyeong-Geun;
    Department of Advanced Materials Science and Engineering, Mokpo National University;Department of Advanced Materials Science and Engineering, Mokpo National University;
Abstract

Nanocrystalline vanadium nitride (VN) coatings were deposited using asymmetric bipolar pulsed dc sputtering to further understand the influence of the pulsed plasmas on the crystal structure, microstructure and mechanical properties. Properties of VN coat

Keywords Pulsed Sputtering;VN;Asymmetric Bipolar;Duty cycle;Pulse frequency;