Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 49(5); 2016
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2016;49(5):467-471. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2016.49.5.467

Analysis of the Na Gettering in PSG/SiO2/Al-1%Si Multilevel Thin Films using XPS and SIMS

  • Kim, Jin Young;
    Department of Electronic Materials Engineering, Kwangwoon University;
Abstract

In order to investigate the Na gettering, PSG/$SiO_2$/Al-1%Si multilevel thin films were fabricated. DC magnetron sputter techniques and APCVD (atmosphere pressure chemical vapor deposition) were utilized for the deposition of Al-1%Si thin film

Keywords Na;Segregation gettering;PSG;SIMS;XPS;