Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 49(6); 2016
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2016;49(6):530-538. Published online: Nov, 30, -0001

PDF

DOI : 10.5695/JKISE.2016.49.6.530

Formation of Metal Electrode on Si3N4 Substrate by Electrochemical Technique

  • Shin, Sung-Chul;Kim, Ji-Won;Kwon, Se-Hun;Lim, Jae-Hong;
    Surface Technology Division Korea, Institute of Materials Science;Surface Technology Division Korea, Institute of Materials Science;Dept. of Materials Science & Engineering, Pusan National University;Surface Technology Division Korea, Institute of Materia
Abstract

There is a close relationship between the performance and the heat generation of the electronic device. Heat generation causes a significant degradation of the durability and/or efficiency of the device. It is necessary to have an effective method to rele

Keywords $Si_3N_4$;Electrochemical process;3-Aminopropyltriethoxysilane;Silane;Electroless deposition;Resistivity;Adhesion strength;