Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 49(6); 2016
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2016;49(6):567-574. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2016.49.6.567

Improvement of Sealing Property of Electrostatic Chuck by Applying Polysilazane Sealant

  • Choi, Jaeyoung;Park, Hyunsu;Son, Min Kyu;Jeong, Chang-oh;Kim, Woo-Byoung;
    Department of Energy Engineering, Dankook University;Department of Energy Engineering, Dankook University;R&D Center, YMC Co., Ltd;R&D Center, YMC Co., Ltd;Department of Energy Engineering, Dankook University;
Abstract

We have analyzed chemical properties of polysiloxane and polysilazane films, respectively, as sealing materials for electrostatic chuck (ESC) and have investigated the possibility of polysilazane as an alternative sealant to polysiloxane. It has been reve

Keywords Electrostatic chuck;Polysiloxane;Polysilazane;Sealing material;