Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 49(6); 2016
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2016;49(6):580-586. Published online: Nov, 30, -0001

PDF

DOI : 10.5695/JKISE.2016.49.6.580

Effect of Si Content on the Phase Formation Behavior and Surface Properties of the Cr-Si-Al-N Coatings

  • Choi, Seon-A;Kim, Hyung-Sun;Kim, Seong-Won;Lee, Sungmin;Kim, Hyung-Tae;Oh, Yoon-Suk;
    Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology;Department of Materials Science and Engineering, Inha University;Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology;Engineering Ceramic Center
Abstract

Cr-Si-Al-N coating with different Si content were deposited by hybrid physical vapor deposition (PVD) method consisting of unbalanced magnetron (UBM) sputtering and arc ion plating (AIP). The deposition temperature was $300^{circ}C$, and the ga

Keywords Cr-Si-Al-N;Hard Coating;Hybrid Physical Vapor Deposition;Arc ion plating;Unbalanced magnetron sputtering;