Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 50(1); 2017
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2017;50(1):35-41. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2017.50.1.35

Corrosion Properties of Atomic Layer Deposited TiO2, Al2O3 and TiO2-Al2O3 Nanolaminated Film Coated 316L Stainless Steel

  • Lee, Woo-Jae;Wan, Zhixin;Kim, Da Young;Jang, Kyung Su;Choi, Hyun-Jin;Choi, Woo-Chang;Kwon, Se Hun;
    School of Materials Science and Engineering, Pusan National University;School of Materials Science and Engineering, Pusan National University;School of Materials Science and Engineering, Pusan National University;Nano Convergence Team, Seo Yeong Co. Ltd.;
Abstract

$TiO_2$, $Al_2O_3$, and $TiO_2-Al_2O_3$ nanolaminated films were grown by atomic layer deposition (ALD) on the 316L stainless steel (SS316L) substrates at a temperature of $150^{circ}C$. The growth kinetics of <

Keywords Atomic layer deposition;Corrosion resistance;$TiO_2$;$Al_2O_3$;$TiO_2-Al_2O_3$;