Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 50(2); 2017
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2017;50(2):55-71. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2017.50.2.55

Application and Processes for Sputtered ITO Films

  • Song, Pung-Keun;
    Department of materials science and engineering, Pusan National University;
Abstract

Transparent Conductive Oxide (TCO), especially Indium Tin Oxide (ITO) films are almost prepared by DC magnetron sputtering because of the advantage of obtaining homogeneous large area coatings with high reproducibility. The purpose of this report is descr

Keywords Magnetron sputtering;ITO films;Amorphous TCO;Thermoelectric property;