Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 50(2); 2017
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2017;50(2):119-124. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2017.50.2.119

A Study on Structure and Magnetic Properties of Fe-N Thin Films with Different DC Magnetron Sputtering Power and Time

  • Han, Dong-Won;Park, Won-Uk;Kim, Jong-Woo;Kwon, Ah-Ram;
    Department of Energy Fusion Technology, Inje University;Department of Energy Fusion Technology, Inje University;Korea Institute of Materials Science;Korea Institute of Industrial Technology;
Abstract

Due to the high saturation magnetization (~2.4 T), $Fe_{16}N_2$ is interesting for the thin film application such as an actuator, data record storage and sensor etc. In this study, Fe-N thin films were deposited on Si(001) substrate with variou

Keywords DC Magnetron Sputtering;$Fe_{16}N_2$;Magnetic Property;Saturation and Remanence Magnetization;