Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 50(3); 2017
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2017;50(3):192-197. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2017.50.3.192

Development of UBMS(Unbalanced Magnetron Sputtering) System and Ion Current Density Measurement of Copper Target

  • Kang, Chunghyeon;Joo, Junghoon;
    Department of Materials Science & Engineering, Kunsan National University;Department of Materials Science & Engineering, Kunsan National University;
Abstract

A 6-way-cross consisting of a 2.75-inch CF flange was used as a main chamber on a PFEIFFER VACUUM TMP station based on a 67 l / sec turbo molecular pump and a diaphragm pump to produce a magnet array with a volume ratio of 5.5: 1.A 1-inch diameter copper

Keywords UBMS(Unbalanced Magnetron Sputtering);Sputtering;Ion current density;