Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 50(3); 2017
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2017;50(3):219-224. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2017.50.3.219

Analysis of the K Gettering in SiO2/PSG/SiO2/Al-1%Si Multilevel Thin Films using SIMS

  • Kim, Jin Young;
    Department of Electronic Materials Engineering, Kwangwoon University;
Abstract

The K gettering in $SiO_2/PSG/SiO_2/Al-1%Si$ multilevel thin films was investigated using SIMS(secondary ion mass spectrometry) and XPS(X-ray Photoelectron Spectroscopy) analysis. DC magnetron sputter techniques and APCVD(atmosphere pressure ch

Keywords K gettering;PSG passivation;SIMS depth profile;