Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 50(5); 2017
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2017;50(5):339-344. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2017.50.5.339

Effect of ALD-Al2O3 Passivation Layer on the Corrosion Properties of CrAlSiN Coatings

  • Wan, Zhixin;Lee, Woo-Jae;Jang, Kyung Su;Choi, Hyun-Jin;Kwon, Se Hun;
    School of Materials Science and Engineering, Pusan National University;School of Materials Science and Engineering, Pusan National University;Nano Convergence Team, Seo Yeong Co. Ltd.;MEMS/NANO Component Production Center, Busan Techno Park;School of Mate
Abstract

Highly corrosion resistance performance of CrAlSiN coatings were obtained by applying ultrathin $Al_2O_3$ thin films using atomic layer deposition (ALD) method. CrAlSiN coatings were prepared on Cr adhesion layer/SUS304 substrates by a hybrid c

Keywords Atomic layer deposition;Corrosion;CrAlSiN hard coatings;Passivation layer;