Oct, 31, 2024

Vol.57 No.5

Editorial Office

Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 50(5); 2017
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2017;50(5):352-359. Published online: Nov, 30, -0001

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Growth of Nanocrystalline Diamond Films on Poly Silicon

  • Kim, Sun Tae;Kang, Chan Hyoung;
    Department of Advanced Materials Engineering, Korea Polytechnic University;Department of Advanced Materials Engineering, Korea Polytechnic University;
Abstract

The growth of nanocrystalline diamond films on a p-type poly silicon substrate was studied using microwave plasma chemical vapor deposition method. A 6 mm thick poly silicon plate was mirror polished and scratched in an ultrasonic bath containing slurries

Keywords Nanocrystalline diamond;Diamond slurry;Ion bombardment;Microwave plasma chemical vapor deposition;Nucleation and growth;