Oct, 31, 2024

Vol.57 No.5

Current Issue Archives
Search
Advanced Search
Editorial Office

Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 50(5); 2017
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2017;50(5):392-397. Published online: Nov, 30, -0001

PDF

DOI : 10.5695/JKISE.2017.50.5.392

High-speed Microcantilever Resonance Testing on the Young`s Modulus of a Nanoscale Titanium Film

  • Kim, Yun Young;
    Division of Mechanical, Automotive, and Robot Component Engineering, Dong-eui University;
Abstract

The Young`s modulus of a nanoscale titanium (Ti) thin-film was evaluated using a high-speed microcantilever resonating at the megahertz frequency in the present study. A 350 nm thick Ti film was deposited on the surface of a silicon microcantilever, and t

Keywords Microcantilever;Resonance testing;Titanium;Thin film;Young`s modulus;