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KISE Journal of Korean Institute of Surface Engineering 2017;50(6):480-485. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2017.50.6.480
Soft mold imprinting method that uses nanostructured polymer mold was investigated for anti-reflection film fabrication. The nanostructured soft mold was polyethylene terephthalate(PET) irradiated by oxygen ion beams. The collisional energy transfer betwe
Keywords Anti-reflection;Nano structure;Polymer;Ion beam;Soft mold;