Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 51(2); 2018
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2018;51(2):110-115. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2018.51.2.110

Analysis of the Na Gettering in SiO2/PSG/SiO2/Al-1%Si and SiO2/TEOS/SiO2/Al-1%Si Multilevel Thin Films using SIMS

  • Kim, Jin Young;
    Department of Electronic Materials Engineering, Kwangwoon University;
Abstract

The Na low temperature gettering in $SiO_2/PSG/SiO_2/Al-1%Si$ and $SiO_2/TEOS/SiO_2/Al-1%Si$ multilevel thin films was investigated using dynamic SIMS(secondary ion mass spectrometry) analysis. DC magnetron sputter, APCVD and PECVD t

Keywords Na;gettering;passivation;dynamic SIMS;