Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 51(6); 2018
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2018;51(6):387-392. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2018.51.6.387

Fabrication of Micro-/Nano- Hybrid 3D Stacked Patterns

  • Park, Tae Wan;Jung, Hyunsung;Bang, Jiwon;Park, Woon Ik;
    Electronic Convergence Materials Division, Korea Institute of Ceramic Engineering & Technology;Electronic Convergence Materials Division, Korea Institute of Ceramic Engineering & Technology;Electronic Convergence Materials Division, Korea Institute of Cer
Abstract

Nanopatterning is one of the essential nanotechnologies to fabricate electronic and energy nanodevices. Therefore, many research group members made a lot of efforts to develop simple and useful nanopatterning methods to obtain highly ordered nanostructure

Keywords Nanopatterning;Nano-transfer printing;3D nanostructure;Hybrid structure;