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Review
- KISE Journal of Korean Institute of Surface Engineering
- Volume 52(2); 2019
- Article
Review
KISE Journal of Korean Institute of Surface Engineering 2019;52(2):84-89. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2019.52.2.84
High Durable Anti-Reflective Polymer with Silica Nanoparticle Array Fabricated by RF Magnetron Sputter
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Advanced Functional Thin Films Dept., Surface Technology Division, Korea of Materials Science;Advanced Functional Thin Films Dept., Surface Technology Division, Korea of Materials Science;Advanced Functional Thin Films Dept., Surface Technology Division,
Abstract
We fabricated durable anti-reflective(AR) layer with silica globular coating on polymer by two steps. Firstly, nano-protrusions of polymer were formed by plasma etching known as R.I.E(reactive ion etching) process. Secondly, silica globular coating was de
Keywords Durability;Anti-Reflection(AR);Silica nanoparticle;RF Magnetron Sputter;