Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 52(4); 2019
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2019;52(4):211-226. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2019.52.4.211

The Properties of Multi-Layered Optical Thin Films Fabricated by Pulsed DC Magnetron Sputtering

  • Kim, Dong-Won;
    Department of Advanced Materials Engineering, Kyonggi University;
Abstract

Optical thin films were deposited by using a reactive pulsed DC magnetron sputtering method with a high density plasma(HDP). In this study, the effect of sputtering process conditions on the microstructure and optical properties of $SiO_2$,

Keywords antireflection film;Pulsed DC magnetron sputtering;multi-layer optical thin film;$SiO_2$ film;$Nb_2O_5$ film;