Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 52(4); 2019
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2019;52(4):227-232. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2019.52.4.227

Effects of Cu Addition on Microstructural and Mechanical Properties of Mo-Cu-N Coatings

  • Kim, Soobyn;Yoon, Hae-Won;Lee, Han-Chan;Moon, KyoungIl;Hong, Hyun Seon;
    Department of Interdisciplinary Eco Science, Sungshin University;Heat Treatment R&D Group, Korea Institute of Industrial Technology;Heat Treatment R&D Group, Korea Institute of Industrial Technology;Heat Treatment R&D Group, Korea Institute of Industrial
Abstract

Mo-N based coatings have been studied for enhancing mechanical characteristics of thin films. In the case of Mo-X-N coatings, the microstructure and mechanical properties can be affected by the addition of the third element. In this work, Mo-Cu-N coatings

Keywords Mo-Cu-N;Cu content;Sputtering;Nanocomposite coating;Thin film;