Oct, 31, 2024

Vol.57 No.5

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Review

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 52(5); 2019
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2019;52(5):239-245. Published online: Nov, 30, -0001

PDF

DOI : 10.5695/JKISE.2019.52.5.239

Arrayed Tip based Pattern Lithography with Built-in Capacitive Proximal Leveling Sensor

  • Han, Yoonsoo;
    Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology (Icheon);
Abstract

To increase the throughput of tip-based nanolithography (TBN), one approach is to use a large array of such tips working in parallel. It is important to maintain co-planarity between the tip array and the writing surface. A slight misalignment can cause l

Keywords capacitive;leveling;lithography;arrayed tip;polymer pen;