Oct, 31, 2024

Vol.57 No.5

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 53(1); 2020
  • Article

Review

KISE Journal of Korean Institute of Surface Engineering 2020;53(1):9-14. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2020.53.1.9

Structural and Optical Properties of CuS Thin Films Grown by RF Magnetron Sputtering

  • Shin, Donghyeok;Lee, SangWoon;Son, Chang Sik;Son, Young Guk;Hwang, Donghyun;
    School of Materials Science and Engineering, Pusan National University;School of Materials Science and Engineering, Pusan National University;Division of Materials Science and Engineering, Silla University;School of Materials Science and Engineering, Pusa
Abstract

CuS (copper sulfide) thin films having the same thickness of 100nm were deposited on the glass substrates using by radio frequency (RF) magnetron sputtering method. RF powers were applied as a process variable for the growth of CuS thin films. The structu

Keywords Covellite;CuS thin film;RF magnetron sputtering;deposition power;solar cell;